JPH0417873U - - Google Patents
Info
- Publication number
- JPH0417873U JPH0417873U JP5861490U JP5861490U JPH0417873U JP H0417873 U JPH0417873 U JP H0417873U JP 5861490 U JP5861490 U JP 5861490U JP 5861490 U JP5861490 U JP 5861490U JP H0417873 U JPH0417873 U JP H0417873U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- spinner head
- head structure
- gravity
- mark
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 230000005484 gravity Effects 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5861490U JPH0417873U (en]) | 1990-06-01 | 1990-06-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5861490U JPH0417873U (en]) | 1990-06-01 | 1990-06-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0417873U true JPH0417873U (en]) | 1992-02-14 |
Family
ID=31584387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5861490U Pending JPH0417873U (en]) | 1990-06-01 | 1990-06-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0417873U (en]) |
-
1990
- 1990-06-01 JP JP5861490U patent/JPH0417873U/ja active Pending